Elektronikilikhase tse khethehilengke lekala la bohlokoa la likhase tse khethehileng. Ba kenella hoo e batlang e le khokahano e 'ngoe le e' ngoe ea tlhahiso ea semiconductor le thepa e makatsang ea ho hlahisoa ha indasteri ea elektroniki e kopaneng le lisebelisoa tsa Planete e sephara.

In Semiconductor theknoloji, likhase tse nang le folete e nang le folete li sebelisoa haholo. Hajoale, 'marakeng oa lefatše oa elektroniki oa elektroniki, likhase tse nang le likhase tsa elektroniki li na le 30% ea kakaretso. Ho na le likhase tse ngata tsa elektroniki ke karolo ea bohlokoa ea likhase tse khethehileng tsa elektroniki lebaleng la lisebelisoa tsa tlhahisoleseling tsa elektroniki. Li sebelisoa haholo e le baemeli ba hloekisa le bahlahisi ba ho hloekisa le barekisi ba li-typain, 'me ba ka sebelisoa e le lits'oants'o tse fapaneng tsa filimi.

Tse latelang li sebelisoa hangata haholo

Nitrogen Trifluoride (NF3): Khase e sebelisetsoang ho hloekisa le ho tlosa li-deponits, hangata e sebelisetsoa ho hloekisa likamore tsa ho hloekisa le lisebelisoa.

Sulphur Hexafluoride (SF6): Moemeli ea pharalletseng o sebelisoang ho li-depositi tsa oxide le khase e sa hlonepheng ea ho tlatsa mecha ea litaba e sa tsitsang.

Hydrogen Fluogede (HF): e sebelisoang ho tlosa oxides ka holim'a silicon le thepa ea silicon le lisebelisoa tse ling.

Nitrogen Fluoride (nf): e sebelisoang ho batch lisebelisoa tse kang silicon nitride (sebe) le aluminium nitride (aluminium nitride (aluminium nitride (aluminium nitride (aluminium nitride (aluminium nitride (aluminium nitride (aluminum nitride (aluminium nitride (aluminium nitride

Trifluoromethane (chf3) leTetrafluoromethane (CF4): E sebelisoa ho lisebelisoa tsa ho ba le fepa tse kang silicon fluoride le aluminium Fluoride.

Leha ho le joalo, likhase tse nang le phofo e nang le metsi a mangata li na le likotsi tse itseng, ho kenyeletsa le chefo, litlolo le bolaoli.

Chefo

Lithuso tse ling tse nang le pherese li na le chefo, joalo ka fedrogen Fluoride (HF), eo mokuli oa hae a ho khopisang letlalong le pherekano ea motho.

Singko

Fydrogen Fluorize le flior e na le fliorrogen le fliors

Bokhachane

Ho na le flitoride e meng e khabisitsoeng ebile e sebetsana le oksijene kapa metsi moeeng ho lokolla mollo kapa likhase tse chefong.

Kotsi e matla ea khatello

Likhai tse ling tse nang le likhaba tse phophotsoeng li phatloha tlas'a khatello e kholo 'me li hloka tlhokomelo e khethehileng ha e sebelisoa le ho bolokoa.

Tšusumetso tikolohong

Khase e nang le pherese e na le boleng bo phahameng ba ho phela le litekanyetso tsa GWP, bo nang le phello e mpe ho letso la Ozone le ba ka baka tšilafalo ea lefatše le tikoloho.

Kopo ea manyonyenyetsi ea masimong a hlahang a kang lipalo a ntse a teteloa, a tlisa tlhoko e ngata ea likhase tse ncha tsa likhase tsa indasteri. Ho ipapisitsoe le palo e kholo ea tlhahiso e ncha ea mekhatlo e mecha ea motlakase lilemong tse 'maloa tse latelang, hammoho le tlhokahalo ea khase e matla ea elektroniki e tla khants'a sekhahla se seholo sa elektroniki.