Elektronikelikhase tse khethehilengke lekala la bohlokoa la likhase tse khethehileng. Li kenella hoo e batlang e le sehokelo se seng le se seng sa tlhahiso ea semiconductor 'me ke lisebelisoa tsa bohlokoahali bakeng sa tlhahiso ea liindasteri tsa elektroniki joalo ka li-circuits tse kopaneng tse kholo, lisebelisoa tse bonts'ang liphanele tse bataletseng le lisele tsa letsatsi.

Ho theknoloji ea semiconductor, likhase tse nang le fluorine li sebelisoa haholo. Hajoale, 'marakeng oa lefatše oa khase ea elektroniki, likhase tsa elektroniki tse nang le fluorine li etsa karolo ea 30% ea kakaretso. Likhase tsa elektronike tse nang le fluorine ke karolo ea bohlokoa ea likhase tse khethehileng tsa elektronike tšimong ea lisebelisoa tsa tlhahisoleseding ea elektronike. Li sebelisoa haholo-holo e le lisebelisoa tsa ho hloekisa le li-etching agents, hape li ka sebelisoa e le li-dopants, lisebelisoa tsa ho etsa lifilimi, joalo-joalo Sehloohong sena, mongoli o tla u nka hore u utloisise likhase tse tloaelehileng tse nang le fluorine.

Tse latelang ke likhase tse sebelisoang hangata tse nang le fluorine

Nitrogen trifluoride (NF3): Khase e sebelisetsoang ho hloekisa le ho tlosa li-deposit, hangata e sebelisetsoang ho hloekisa likamore tse arabelang le lisebelisoa.

Sulfur hexafluoride (SF6): Sesebelisoa sa fluorinating se sebelisoang lits'ebetsong tsa oxide deposition le e le khase e sireletsang bakeng sa ho tlatsa mecha ea litaba ea insulating.

Hydrogen fluoride (HF): E sebelisoa ho tlosa li-oxide ho tloha holim'a silicon le joalo ka etchant bakeng sa etching silicon le lisebelisoa tse ling.

Nitrogen fluoride (NF): E sebelisoa ho etch lisebelisoa tse kang silicon nitride (SiN) le aluminium nitride (AlN).

Trifluoromethane (CHF3) letetrafluoromethane (CF4): E sebelisetsoa ho etch thepa ea fluoride joalo ka silicon fluoride le aluminium fluoride.

Leha ho le joalo, likhase tse nang le fluorine li na le likotsi tse itseng, tse akarelletsang chefo, ho senya le ho cha.

Chefo

Likhase tse ling tse nang le fluorine li chefo, joalo ka hydrogen fluoride (HF), eo mouoane oa eona o hlabang haholo letlalong le pampiring ea ho hema 'me o kotsi bophelong ba batho.

Ho senya

Hydrogen fluoride le fluoride tse ling li senya haholo 'me li ka baka tšenyo e tebileng letlalong, mahlo le matšoafong.

Ho chesa

Li-fluoride tse ling lia tuka 'me li arabela ka oksijene kapa metsi moeeng ho ntša mocheso o matla le likhase tse chefo, tse ka bakang mollo kapa ho phatloha.

Kotsi ea khatello e phahameng

Likhase tse ling tsa fluorinated li phatloha tlas'a khatello e phahameng 'me li hloka tlhokomelo e khethehileng ha li sebelisoa le ho bolokoa.

Tšusumetso tikolohong

Ligase tse nang le fluorine li na le bophelo bo phahameng ba sepakapaka le boleng ba GWP, tse nang le phello e senyang lealeng la ozone ea atmosfere 'me li ka baka ho futhumala ha lefatše le tšilafalo ea tikoloho.

Ts'ebeliso ea likhase libakeng tse ntseng li hlaha joalo ka lisebelisoa tsa elektroniki li ntse li tsoela pele ho teba, ho tlisa palo e kholo ea tlhokahalo e ncha ea likhase tsa indasteri. Ho ipapisitsoe le palo e kholo ea matla a macha a tlhahiso ea likarolo tse kholo tsa elektroniki joalo ka li-semiconductors le liphanele tsa ponts'o naheng ea China lilemong tse 'maloa tse tlang, hammoho le tlhokahalo e matla ea ho kenya thepa ea lik'hemik'hale tsa elektroniki sebakeng sa kantle, indasteri ea khase ea lapeng e tla kenya letsoho. sekhahla se phahameng sa kholo.