Elektronikilikhase tse khethehilengke lekala la bohlokoa la likhase tse khethehileng. Li kenella hoo e ka bang khokahanong e 'ngoe le e 'ngoe ea tlhahiso ea semiconductor 'me ke thepa e tala ea bohlokoa bakeng sa tlhahiso ea liindasteri tsa elektroniki tse kang lipotoloho tse kopaneng tse kholo haholo, lisebelisoa tsa ponts'o ea phanele e bataletseng, le lisele tsa letsatsi.

Theknolojing ea semiconductor, likhase tse nang le fluorine li sebelisoa haholo. Hona joale, 'marakeng oa lefatše oa khase ea elektroniki, likhase tsa elektroniki tse nang le fluorine li etsa hoo e ka bang 30% ea kakaretso. Likhase tsa elektroniki tse nang le fluorine ke karolo ea bohlokoa ea likhase tse khethehileng tsa elektroniki lefapheng la lisebelisoa tsa tlhahisoleseling tsa elektroniki. Li sebelisoa haholo-holo e le lisebelisoa tsa ho hloekisa le tsa ho hlaba, 'me li ka boela tsa sebelisoa e le lintho tse tlatsetsang, thepa e etsang filimi, jj. Sehloohong sena, mongoli o tla u thusa ho utloisisa likhase tse tloaelehileng tse nang le fluorine.

Tse latelang ke likhase tse nang le fluorine tse sebelisoang hangata.

Nitrogen trifluoride (NF3): Khase e sebediswang ho hlwekisa le ho ntsha ditshila, hangata e sebediswang ho hlwekisa dikamore tsa karabelo le bokahodimo ba disebediswa.

Sebabole hexafluoride (SF6): Moemeli oa fluorinating o sebelisoang lits'ebetsong tsa ho boloka oxide le e le khase e thibelang mocheso bakeng sa ho tlatsa mecha ea ho thibela mocheso.

Hydrogen fluoride (HF): E sebelisoa ho tlosa di-oxide hodima silicon mme e le ntho e thusang ho tjhesa silicon le thepa e nngwe.

Fluoride ea naetrojene (NF): E sebelisetsoa ho tjhesa thepa e kang silicon nitride (SiN) le aluminium nitride (AlN).

Trifluoromethane (CHF3) letetrafluoromethane (CF4): E sebelisetsoa ho tjhesa thepa ea fluoride e kang silicon fluoride le aluminium fluoride.

Leha ho le jwalo, dikgase tse nang le fluorine di na le dikotsi tse itseng, ho kenyeletswa le chefo, ho bola le ho tuka ha tsona.

Chefo

Likhase tse ling tse nang le fluorine li chefo, joalo ka hydrogen fluoride (HF), eo mouoane oa eona o halefisang letlalo le tsela ea ho hema haholo 'me o kotsi bophelong ba batho.

Ho senyeha

Hydrogen fluoride le di-fluoride tse ding di senya haholo mme di ka baka tshenyo e kgolo letlalong, mahlong le tseleng ya ho hema.

Ho cha

Li-fluoride tse ling lia tuka 'me li arabela le oksijene kapa metsi moeeng ho ntša mocheso o matla le likhase tse chefo, tse ka bakang mollo kapa ho phatloha.

Kotsi ea khatello e phahameng

Likhase tse ling tse nang le fluorine lia phatloha tlas'a khatello e phahameng 'me li hloka tlhokomelo e khethehileng ha li sebelisoa le ho bolokoa.

Tšusumetso tikolohong

Likhase tse nang le fluorine li na le nako e phahameng ea bophelo ba sepakapaka le boleng ba GWP, tse nang le phello e senyang lera la ozone la sepakapaka 'me li ka baka ho futhumala ha lefatše le tšilafalo ea tikoloho.

Tšebeliso ea likhase masimong a ntseng a hlaha a kang lisebelisoa tsa elektroniki e ntse e tsoela pele ho teba, e leng se tlisang tlhoko e kholo ea likhase tsa indasteri. Ho latela bongata ba bokhoni bo bocha ba tlhahiso ea likarolo tse kholo tsa elektroniki tse kang li-semiconductor le liphanele tsa lipontšo Chaena lilemong tse 'maloa tse tlang, hammoho le tlhoko e matla ea ho nkeloa sebaka ha lisebelisoa tsa lik'hemik'hale tsa elektroniki tse tsoang kantle ho naha, indasteri ea khase ea elektroniki ea lehae e tla tlisa sekhahla se phahameng sa kholo.