Likhase tse khethehileng tsa elektroniki tse nang le fluorine li kenyelletsasulfur hexafluoride (SF6)tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) le octafluoropropane (C3F8).
Ka nts'etsopele ea nanotechnology le nts'etsopele e kholo ea indasteri ea lisebelisoa tsa elektroniki, tlhoko ea eona e tla eketseha letsatsi le letsatsi. Nitrogen trifluoride, e le khase e khethehileng ea elektronike e bohlokoahali ebile e sebelisoa ka ho fetisisa tlhahisong le tšebetsong ea liphanele le li-semiconductors, e na le sebaka se pharaletseng sa mmaraka.
E le mofuta oa khase e khethehileng e nang le fluorine,naetrojene trifluoride (NF3)ke sehlahisoa sa elektronike se khethehileng sa khase se nang le matla a maholohali a 'maraka. Ha e na lik'hemik'hale mochesong oa kamore, e sebetsa ho feta oksijene mochesong o phahameng, e tsitsitse ho feta fluorine, 'me ho bonolo ho e tšoara. Nitrogen trifluoride e sebelisoa haholo joalo ka plasma etching gase le mochini o hloekisang kamore ea karabelo, 'me e loketse masimo a tlhahiso ea li-chips tsa semiconductor, li-flat panel displays, optical fibers, photovoltaic cell, joalo-joalo.
Ha ho bapisoa le likhase tse ling tsa elektroniki tse nang le fluorine,naetrojene trifluoridee na le melemo ea karabelo e potlakileng le ts'ebetso e phahameng. Haholo-holo ha ho hlophisoa lisebelisoa tse nang le silicon tse kang silicon nitride, e na le sekhahla se phahameng sa etching le selectivity, e siea ho se na masala holim'a ntho e kentsoeng. Hape ke ntho e ntle haholo ea ho hloekisa 'me ha e na tšilafalo holimo, e ka finyellang litlhoko tsa ts'ebetso ea ts'ebetso.
Nako ea poso: Sep-14-2024
