Palo e kholo ea khase e khethehileng - nitrogen trifluoride nf3

Isisonductor ea naha ea Sehamiconductor le indasteri ea panene e boloka katleho e phahameng ea nala. Nitrogen Trifluoride e ne e le khase ea elektroniki e khethehileng le e kholo ka ho fetisisa ea ho ntlafatsa tlhahiso le ts'ebetsong ea li-panels le li-semicoctor.

Hangata likhase tse tloaelehileng tsa elektroniki li kenyelletsaSulphur Hexafluoride (SF6), li-tungnsten hexafluorride (wf6),Carbon Tetrafluoride (CF4), Trifluoromethane (Ch3), Nitrogen Trifluoride (NATROGEN TRFFUORID (NF3), Hex3), Hexfluroege (C2F6) le Ocluoropane (C3f8). Nitrogen Trifluoride (NF3) e sebelisoa haholo e le mohloli oa fluoge bakeng sa lipalesa tsa lik'hilograma tse phahameng tsa hydrogen. Karolo e sebetsang (hoo e ka bang 25%) ea matla a karabelo pakeng tsa h2-o2 le f2 e ka lokolloa ke li-laser tse tšehali har'a li-laeses.

Nitrogen Trifluoride ke plasma e ntle haholo ea plasma e sa etlollang khase ka indasteri ea likokoana-hloko. Bakeng sa e-ba silicon le silicon nitride Haholo-holo ho ekaba la lisebelisoa tse kopaneng tse nang le botenya ka tlase ho 1.5um, naetrogen Trifluoride e na le sekhahla se setle haholo, mme hape ke moemeli ea hloae. Ka nts'etsopele ea Nanotechnology le nts'etsopele e kholo ea indasteri ea elektroniki, tlhoko ea eona e tla eketsa letsatsi le letsatsi.

E le mofuta oa fofo - e nang le khase e khethehileng, Nitrogen Trifluor (nf3) ke sehlahisoa se seholo sa khase e khethehileng 'marakeng. Ke ka lik'hemik'hale ka mocheso oa kamore, e sebetsang haholoanyane ho feta oksijene, e tsitsitseng ho feta foorrine, ebile ho bonolo ho sebetsana le folete e phahameng.

Setsebi sa Nitrogen Trifluooride e sebelisoa haholo e le li-plasma tse sa hloekang

Ha ho bapisoa le likhase tse ling tse ngata tsa elektroniki, 'me le ts'ebetso e phahameng haholo,' me ha e qalelle ho ea pele ebile e ka fihlela litlhoko tsa ts'ebetso ts'ebetso.