Ts'ebetsong ea tlhahiso ea li-semiconductor wafer foundries tse nang le ts'ebetso e tsoetseng pele ea tlhahiso, ho hlokahala mefuta e ka bang 50 ea likhase. Ligase ka kakaretso li arotsoe ka likhase tse ngata lelikhase tse khethehileng.

Tšebeliso ea likhase ho liindasteri tsa microelectronics le semiconductor Tšebeliso ea likhase e 'nile ea phetha karolo ea bohlokoa lits'ebetsong tsa semiconductor, haholo-holo mekhoa ea semiconductor e sebelisoa haholo liindastering tse sa tšoaneng. Ho tloha ULSI, TFT-LCD ho ea indastering ea hona joale ea li-micro-electromechanical (MEMS), mekhoa ea semiconductor e sebelisoa e le mekhoa ea tlhahiso ea lihlahisoa, ho kenyelletsa le etching e omileng, oxidation, implantation ea ion, deposition e tšesaane ea filimi, joalo-joalo.

Ka mohlala, batho ba bangata ba tseba hore li-chips li entsoe ka lehlabathe, empa ha u sheba ts'ebetso eohle ea ho etsa li-chips, ho hlokahala lisebelisoa tse eketsehileng, tse kang photoresist, mokelikeli oa polishing, thepa e shebiloeng, khase e khethehileng, joalo-joalo. Ho paka ka morao ho boetse ho hloka li-substrates, li-interposer, liforeimi tse etellang pele, lisebelisoa tsa ho kopanya, joalo-joalo tsa lisebelisoa tse fapaneng. Likhase tse khethehileng tsa elektronike ke thepa ea bobeli e kholo ka ho fetisisa litšenyehelong tsa tlhahiso ea semiconductor ka mor'a li-wafers tsa silicon, tse lateloang ke limaske le li-photoresists.

Ho hloeka ha khase ho na le tšusumetso e tiileng mabapi le ts'ebetso ea karolo le tlhahiso ea lihlahisoa, 'me polokeho ea phepelo ea khase e amana le bophelo bo botle ba basebetsi le polokeho ea ts'ebetso ea feme. Ke hobane'ng ha ho hloeka ha khase ho na le tšusumetso e kholo tseleng ea ts'ebetso le basebetsi? Sena ha se ho feteletsa litaba, empa se khethoa ke litšobotsi tse kotsi tsa khase ka boeona.

Khethollo ea likhase tse tloaelehileng indastering ea semiconductor

Khase e Tloaelehileng

Khase e tloaelehileng e boetse e bitsoa khase e ngata: e bua ka khase ea indasteri e nang le tlhoko ea bohloeki e tlase ho 5N le tlhahiso e kholo ea tlhahiso le thekiso. E ka aroloa ka khase ea karohano ea moea le khase ea maiketsetso ho latela mekhoa e fapaneng ea ho itokisa. Hydrogen (H2), naetrojene (N2), oksijene (O2), argon (A2), joalo-joalo;

Khase e khethehileng

Khase e khethehileng e bolela khase ea indasteri e sebelisoang libakeng tse itseng 'me e na le litlhoko tse khethehileng bakeng sa bohloeki, mefuta-futa le thepa. Haholo-holoSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… joalo joalo.

Mefuta ea likhase tsa Spicial

Mefuta ea likhase tse khethehileng: tse senyang, tse chefo, tse ka tukang, tse tšehetsang mollo, tse kenang, joalo-joalo.
Likhase tsa semiconductor tse sebelisoang hangata li arotsoe ka tsela e latelang:
(i) E senya / e chefo:HCl,BF3, WF6,HBr,SiH2Cl2,NH3,PH3,Cl2,BCl3…
(ii) E ka cha: H2,CH4,SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) E ka cha: O2, Cl2, N2O, NF3...
(iv) Inert: N2,CF4Tlhaloso: C2F6C4F8,SF6CO2,Ne,Kr, Yena…

Ts'ebetsong ea tlhahiso ea semiconductor chip, mefuta e ka bang 50 ea likhase tse khethehileng (tse bitsoang likhase tse khethehileng) li sebelisoa ho oxidation, diffusion, deposition, etching, injection, photolithography le mekhoa e meng, 'me mehato eohle ea ts'ebetso e feta makholo. Ka mohlala, PH3 le AsH3 li sebelisoa e le mehloli ea phosphorus le arsenic ts'ebetsong ea ho kenngoa ha ion, likhase tse thehiloeng ho F CF4, CHF3, SF6 le likhase tsa halogen CI2, BCI3, HBr li atisa ho sebelisoa ts'ebetsong ea etching, SiH4, NH3, N2O ho ts'ebetso ea filimi ea deposition, F2 / Kr / Ne, Kr / Ne ts'ebetsong ea photolithography.

Ho tsoa lintlheng tse ka holimo, re ka utloisisa hore likhase tse ngata tsa semiconductor li kotsi 'meleng oa motho. Haholo-holo, likhase tse ling, tse kang SiH4, li itlhoekisa. Hafeela li ntse li lutla, li tla itšoara ka matla ka oksijene moeeng ebe li qala ho chesa; 'me AsH3 e chefo haholo. Ho lutla hanyenyane ho ka baka kotsi bophelong ba batho, kahoo litlhoko tsa ts'ireletso ea moralo oa tsamaiso bakeng sa tšebeliso ea likhase tse khethehileng li phahame haholo.

Li-semiconductors li hloka likhase tse hloekileng haholo ho ba le "likarolo tse tharo"

Bohloeki ba khase

Litaba tsa sepakapaka se sa hloekang ka har'a khase hangata li hlahisoa e le peresente ea bohloeki ba khase, joalo ka 99.9999%. Ka kakaretso, tlhokeho ea bohloeki bakeng sa likhase tse khethehileng tsa elektroniki e fihla ho 5N-6N, hape e bontšoa ke tekanyo ea molumo oa sepakapaka se sa hloekang ppm (karolo ea milione), ppb (karolo ea bilione), le ppt (karolo ea trilione). Sebaka sa elektroniki sa semiconductor se na le litlhoko tse phahameng ka ho fetisisa bakeng sa bohloeki le botsitso ba boleng ba likhase tse khethehileng, 'me bohloeki ba likhase tse khethehileng tsa elektroniki hangata bo feta 6N.

Ho omella

Liteng tsa trace water ka khase, kapa metsi, hangata li hlahisoa ka phoka, joalo ka phoka ea atmospheric -70℃.

Bohloeki

Palo ea likaroloana tse silafatsang ka khase, likaroloana tse nang le karoloana ea µm, e hlahisoa ka likaroloana tse kae/M3. Bakeng sa moea o hatelitsoeng, hangata o hlahisoa ka mg/m3 ea masala a tiileng a ke keng a qojoa, a kenyeletsang oli.