Epitaxal (kholo)Lenane le kopaneng la GAs

Indastering ea semiconductor, khase e ne e sebelisetsoa ho hola e le 'ngoe kapa thepa ea lik'hemik'hale e khethiloeng ka hloko e bitsoa khase e khethiloeng ka hloko.

Hangata likhase tse sebelisoang tse sebelisoang tse sebelisoang li-sicloxitane li kenyelletsa dichlorosilane, silicon tetrachphorde leSilane. Haholo-holo e sebelisoa bakeng sa depositition ea Sicon ea Dipitaxal, ea lifilimi tsa silicon, depide ea lifilimi, e leng litšoantšo tse ling tsa silika.

Kakaretso ea li-vachur Vapor (CVD) khase e tsoakiloeng

CVD ke mokhoa oa ho beha likarolo tse itseng le likhakanyo tsa lik'hemik'hale tsa khase a neng a sebelisa metsoako e sa tloaelehang, ke hore, mokhoa o etsang mokhoa oa ho sebelisa khase ka lik'hemik'hale. Ho latela mofuta oa filimi e thehileng, depositi ea li-vaecrant tsa lik'hemik'hale (CVD) Khase e sebelisitsoeng le eona e fapane le eona.

Ho fofaKhase e tsoakaneng

Ka har'a tlhahiso ea lisebelisoa tsa semiconductor, ho na le litšila tse kopaneng, lisekoere tse ling ho fana ka lisebelisoa tse fumanehang ts'ebetsong ea ho foka li bitsoa khase.

Haholo-holo e kenyelletsa Arneine, phosphone trifluoride, phosphorus Penfluoride, oa bongakaBoron Trifluor, diborane, joalo-joalo

Ka tloaelo, mohloli o nonneng o kopantsoe le khase ea ho tsamaisa thepa (joalo ka Argon le naetrojene) ka lehare la mohloli. Kamora ho kopanya, phallo ea khase e ntse e akheloa hanyane ka seboping e fapaneng 'me e pota-potile, ho beha li-silicon holim' a silise e falitseng silicon.

EnchingMotsoako oa khase

Etching ke ho tsoa ho tsench sebaka se sebetsang (joalo ka filimi ea ho sebetsa (joalo ka filimi ea siliniki, ha e ntse e boloka sebaka se nang le setšoantšo se hlokahalang.

Mekhoa ea ho itlotsa ka thabo e kenyeletsa eching ea lik'hemik'hale ea lik'hemik'hale e nang le lik'hemik'hale tse tšoeu tsa lik'hemik'hale. Khase e sebelisitsoeng ka har'a lik'hemik'hale e omileng e bitsoa khase.

Khase e sa tsoakoang hangata ke khase ea fluoride (halide), joalo kaCarbon Tetrafluoride, naetrogen trifluoride, Trifluoromethane, Hexafluroethane, Perfbuoropane, joalo-joalo