Likhase tsa Ultra-high purity (UHP) ke bophelo ba indasteri ea semiconductor.Ha tlhokahalo e neng e e-so ka e bonoa le litšitiso ho liketane tsa phepelo ea lefats'e li phahamisa theko ea khase e phahameng haholo, moralo o mocha oa semiconductor le mekhoa ea tlhahiso e ntse e eketsa boemo ba taolo ea tšilafalo e hlokahalang.Bakeng sa baetsi ba semiconductor, ho khona ho netefatsa bohloeki ba khase ea UHP ho bohlokoa ho feta leha e le neng pele.

Ligase tsa Ultra High Purity (UHP) li bohlokoa ka ho Fetisisa Tlhahisong ea Kajeno ea Semiconductor Manufacturing.

E 'ngoe ea lisebelisoa tse ka sehloohong tsa khase ea UHP ke inertization: Khase ea UHP e sebelisetsoa ho fana ka sepakapaka se sireletsang ho pota-pota likarolo tsa semiconductor, ka tsela eo ho li sireletsa liphellong tse kotsi tsa mongobo, oksijene le litšila tse ling sepakapakeng.Leha ho le joalo, inertization ke e 'ngoe ea mesebetsi e mengata e fapaneng eo likhase li e etsang indastering ea semiconductor.Ho tloha ho likhase tsa plasma tsa mantlha ho ea ho likhase tse sebetsang tse sebelisoang ho etching le ho annealing, likhase tsa khatello e phahameng haholo li sebelisetsoa merero e mengata e fapaneng 'me li bohlokoa ho pholletsa le ketane ea phepelo ea semiconductor.

Tse ling tsa likhase tsa "core" indastering ea semiconductor li kenyelletsanaetrojene(e sebelisoa e le ho hloekisa ka kakaretso le khase ea inert),argon(e sebelisoa e le khase ea mantlha ea plasma karabelong ea etching le deposition),helium(e sebedisoang joalo ka khase ea inert e nang le thepa e khethehileng ea ho fetisa mocheso) lehaedrojene(e bapala likarolo tse ngata ho annealing, deposition, epitaxy le ho hloekisa plasma).

Joalokaha theknoloji ea semiconductor e fetohile le ho fetoha, ho joalo le ka likhase tse sebelisoang ts'ebetsong ea tlhahiso.Kajeno, limela tsa tlhahiso ea semiconductor li sebelisa mefuta e mengata ea likhase, ho tloha likhase tse ntle tse kangkryptonleneonho mefuta e sebetsang hantle e kang nitrogen trifluoride (NF 3) le tungsten hexafluoride (WF 6).

Tlhokahalo e ntseng e hola ea bohloeki

Ho tloha ha ho qaptjoa microchip ea pele ea khoebo, lefats'e le bone keketseho e makatsang e haufi-ufi le ts'ebetso ea lisebelisoa tsa semiconductor.Lilemong tse hlano tse fetileng, e 'ngoe ea litsela tse tiileng tsa ho finyella mofuta ona oa ntlafatso ea ts'ebetso e bile ka "ho eketsa boholo": ho fokotsa likarolo tsa bohlokoa tsa meralo e teng ea chip e le ho petetsa li-transistors tse ngata sebakeng se fanoeng.Ntle le sena, nts'etsopele ea meralo e mecha ea meralo ea li-chip le ts'ebeliso ea lisebelisoa tsa morao-rao li hlahisitse phallo ea ts'ebetso ea lisebelisoa.

Kajeno, litekanyo tse mahlonoko tsa li-semiconductors tse hahelletsoeng li se li le nyane hoo ho lekanya boholo ha e sa le mokhoa o sebetsang oa ho ntlafatsa ts'ebetso ea sesebelisoa.Sebakeng seo, bafuputsi ba semiconductor ba batla litharollo ka mokhoa oa lisebelisoa tse ncha le meralo ea 3D chip.

Lilemo tse mashome tsa ntlafatso e sa khathaleng li bolela hore lisebelisoa tsa kajeno tsa semiconductor li matla haholo ho feta li-microchips tsa khale - empa li boetse li fokola haholo.Ho fihla ha thekenoloji ea ho etsa li-wafer ea 300mm ho ekelitse boemo ba taolo ea litšila e hlokahalang bakeng sa tlhahiso ea semiconductor.Esita le tšilafalo e nyenyane ka ho fetisisa ts'ebetsong ea tlhahiso (haholo-holo likhase tse sa tloaelehang kapa tse sa sebetseng) li ka lebisa ho hloleheng ha thepa ea tlokotsi - kahoo ho hloeka ha khase hona joale ho bohlokoa ho feta leha e le neng pele.

Bakeng sa semela se tloaelehileng sa tlhahiso ea semiconductor, khase ea ultra-high-purity e se e ntse e le litšenyehelo tse kholo ka ho fetisisa tsa thepa ka mor'a silicon ka boeona.Litšenyehelo tsena li lebelletsoe ho eketseha ha tlhoko ea li-semiconductors e ntse e phahama ho ea holimo.Liketsahalo tsa Europe li bakile tšitiso e eketsehileng 'marakeng oa khase ea tlhaho o matla haholo.Ukraine ke e mong oa kholo ka ho fetisisa lefatšeng barekisi ba phahameng bohloekineonlipontšo;Tlhaselo ea Russia e bolela hore phepelo ea khase e sa tloaelehang e ea thibeloa.Sena se ile sa etsa hore ho be le likhaello le litheko tse phahameng tsa likhase tse ling tse ntle tse kangkryptonlexenon.