Likhase tsa Ultra-high purity (UHP) ke bophelo ba indasteri ea semiconductor. Ha tlhokahalo e neng e e-so ka e bonoa le litšitiso ho liketane tsa phepelo ea lefats'e li phahamisa theko ea khase e phahameng haholo, moralo o mocha oa semiconductor le mekhoa ea tlhahiso e ntse e eketsa boemo ba taolo ea tšilafalo e hlokahalang. Bakeng sa baetsi ba semiconductor, ho khona ho netefatsa bohloeki ba khase ea UHP ho bohlokoa ho feta leha e le neng pele.

Ligase tsa Ultra High Purity (UHP) li bohlokoa ka ho Fetisisa Tlhahisong ea Kajeno ea Semiconductor Manufacturing.

E 'ngoe ea lisebelisoa tse ka sehloohong tsa khase ea UHP ke inertization: Khase ea UHP e sebelisetsoa ho fana ka sepakapaka se sireletsang ho pota-pota likarolo tsa semiconductor, ka hona ho li sireletsa liphellong tse kotsi tsa mongobo, oksijene le litšila tse ling sepakapakeng. Leha ho le joalo, inertization ke e 'ngoe ea mesebetsi e mengata e fapaneng eo likhase li e etsang indastering ea semiconductor. Ho tloha ho likhase tsa mantlha tsa plasma ho ea ho likhase tse sebetsang tse sebelisoang ho etching le ho annealing, likhase tsa khatello e phahameng haholo li sebelisetsoa merero e mengata e fapaneng 'me li bohlokoa ho pholletsa le ketane ea phepelo ea semiconductor.

Tse ling tsa likhase tsa "core" indastering ea semiconductor li kenyelletsanaetrojene(e sebelisoa e le ho hloekisa ka kakaretso le khase ea inert),argon(e sebelisoa e le khase ea mantlha ea plasma karabelong ea etching le deposition),helium(e sebedisoang joalo ka khase ea inert e nang le thepa e khethehileng ea ho fetisa mocheso) lehaedrojene(e bapala likarolo tse ngata ho annealing, deposition, epitaxy le ho hloekisa plasma).

Joalokaha theknoloji ea semiconductor e fetohile le ho fetoha, ho joalo le ka likhase tse sebelisoang ts'ebetsong ea tlhahiso. Kajeno, limela tsa tlhahiso ea semiconductor li sebelisa mefuta e mengata ea likhase, ho tloha likhase tse ntle tse kangkryptonleneonho mefuta e sebetsang hantle e kang nitrogen trifluoride (NF 3) le tungsten hexafluoride (WF 6).

Tlhokahalo e ntseng e hola ea bohloeki

Ho tloha ha ho qaptjoa microchip ea pele ea khoebo, lefats'e le bone keketseho e makatsang e haufi-ufi le ts'ebetso ea lisebelisoa tsa semiconductor. Lilemong tse hlano tse fetileng, e 'ngoe ea litsela tse tiileng tsa ho finyella mofuta ona oa ntlafatso ea ts'ebetso e bile ka "ho eketsa boholo": ho fokotsa likarolo tsa bohlokoa tsa meralo e teng ea chip e le ho petetsa li-transistors tse ngata sebakeng se fanoeng. Ntle le sena, nts'etsopele ea meralo e mecha ea meralo ea li-chip le ts'ebeliso ea lisebelisoa tsa morao-rao li hlahisitse phallo ea ts'ebetso ea lisebelisoa.

Kajeno, litekanyo tse mahlonoko tsa li-semiconductors tse hahelletsoeng joale li nyane hoo ho eketsa boholo ha e sa le mokhoa o sebetsang oa ho ntlafatsa ts'ebetso ea sesebelisoa. Sebakeng seo, bafuputsi ba semiconductor ba batla litharollo ka mokhoa oa lisebelisoa tse ncha le meralo ea 3D chip.

Lilemo tse mashome tsa ntlafatso e sa khathaleng li bolela hore lisebelisoa tsa kajeno tsa semiconductor li matla ho feta li-microchips tsa khale - empa li boetse li fokola haholo. Ho fihla ha thekenoloji ea ho etsa li-wafer ea 300mm ho ekelitse boemo ba taolo ea litšila e hlokahalang bakeng sa tlhahiso ea semiconductor. Esita le tšilafalo e nyenyane ka ho fetisisa ts'ebetsong ea tlhahiso (haholo-holo likhase tse sa tloaelehang kapa tse sa sebetseng) li ka lebisa ho hloleheng ha thepa ea tlokotsi - kahoo bohloeki ba khase hona joale bo bohlokoa ho feta leha e le neng pele.

Bakeng sa semela se tloaelehileng sa tlhahiso ea semiconductor, khase ea ultra-high-purity e se e ntse e le litšenyehelo tse kholo ka ho fetisisa tsa thepa ka mor'a silicon ka boeona. Litšenyehelo tsena li lebelletsoe ho eketseha ha tlhoko ea li-semiconductors e ntse e phahama ho ea holimo. Liketsahalo tsa Europe li bakile tšitiso e eketsehileng 'marakeng oa khase ea tlhaho o matla haholo. Ukraine ke e mong oa kholo ka ho fetisisa lefatšeng barekisi ba phahameng bohloekineonlipontšo; Tlhaselo ea Russia e bolela hore phepelo ea khase e sa tloaelehang e ea thibeloa. Sena se ile sa etsa hore ho be le likhaello le litheko tse phahameng tsa likhase tse ling tse ntle tse kangkryptonlexenon.