Dikhase tse hlwekileng haholo (UHP) ke madi a bophelo indastering ya di-semiconductor. Ha tlhoko e e-so ka e e-ba teng le ditshitiso tsa diketane tsa phepelo tsa lefatshe di phahamisa theko ya kgase e nang le kgatello e phahameng haholo, moralo o motjha wa di-semiconductor le mekgwa ya tlhahiso di eketsa boemo ba taolo ya tshilafatso e hlokahalang. Bakeng sa bahlahisi ba di-semiconductor, ho kgona ho netefatsa bohlweki ba kgase ya UHP ho bohlokwa ho feta leha e le neng pele.

Likhase tsa Ultra High Purity (UHP) li Bohlokoa ka ho Fetisisa Tlhahisong ea Semiconductor ea Kajeno

E 'ngoe ea lits'ebetso tse ka sehloohong tsa khase ea UHP ke ho se kenelle: Khase ea UHP e sebelisetsoa ho fana ka sepakapaka se sireletsang ho potoloha likarolo tsa semiconductor, ka hona e li sireletsa liphellong tse kotsi tsa mongobo, oksijene le litšila tse ling sepakapakeng. Leha ho le joalo, ho se kenelle ke e 'ngoe feela ea mesebetsi e mengata e fapaneng eo likhase li e etsang indastering ea semiconductor. Ho tloha likhase tsa plasma tsa mantlha ho ea likhase tse arabelang tse sebelisoang ho etching le ho annealing, likhase tsa khatello e phahameng haholo li sebelisoa bakeng sa merero e mengata e fapaneng 'me li bohlokoa ho pholletsa le ketane ea phepelo ea semiconductor.

Tse ling tsa likhase tse "bohlokwa" indastering ea semiconductor li kenyelletsanaetrojene(e sebelisoa e le sesebelisoa sa ho hloekisa ka kakaretso le khase e sa sebetseng),argon(e sebelisoa e le khase ea mantlha ea plasma liketsong tsa ho hlaba le ho beha lintho),helium(e sebelisoa e le khase e sa sebetseng e nang le thepa e ikhethang ea phetisetso ea mocheso) lehaeterojene(e bapala karolo e mengata ho annealing, deposition, epitaxy le plasma cleaning).

Jwalo ka ha theknoloji ya semiconductor e fetohile mme e fetohile, le dikhase tse sebediswang tshebetsong ya tlhahiso le tsona di fetohile. Kajeno, difeme tsa tlhahiso ya semiconductor di sebedisa mefuta e mengata ya dikhase, ho tloha ho dikhase tse ntle tse kangkryptonleneonho mefuta e arabelang e kang nitrogen trifluoride (NF3) le tungsten hexafluoride (WF6).

Tlhoko e ntseng e hola ea bohloeki

Ho tloha ha ho qaptjoa microchip ea pele ea khoebo, lefats'e le bone keketseho e makatsang e batlang e le ea bohlokoa ts'ebetsong ea lisebelisoa tsa semiconductor. Lilemong tse hlano tse fetileng, e 'ngoe ea litsela tse tiileng tsa ho fihlela mofuta ona oa ntlafatso ea ts'ebetso e bile ka "ho lekanya boholo": ho fokotsa litekanyo tsa bohlokoa tsa meralo ea chip e teng e le ho hatella li-transistors tse ngata sebakeng se fanoeng. Ho phaella ho sena, nts'etsopele ea meralo e mecha ea chip le ts'ebeliso ea thepa ea sejoale-joale li hlahisitse keketseho ts'ebetsong ea sesebelisoa.

Kajeno, litekanyo tsa bohlokoa tsa li-semiconductor tsa sejoale-joale li nyane hoo boholo ba tsona e seng e se tsela e sebetsang ea ho ntlafatsa ts'ebetso ea sesebelisoa. Ho e-na le hoo, bafuputsi ba li-semiconductor ba batla litharollo ka mokhoa oa thepa e ncha le meralo ea li-chip tsa 3D.

Lilemo tse mashome tsa ho qaptjoa bocha ho sa khathaleng li bolela hore lisebelisoa tsa semiconductor tsa kajeno li matla haholo ho feta li-microchip tsa khale - empa li boetse lia fokola haholoanyane. Ho hlaha ha theknoloji ea tlhahiso ea wafer ea 300mm ho ekelitse boemo ba taolo ea litšila e hlokahalang bakeng sa tlhahiso ea semiconductor. Esita le tšilafalo e nyane haholo ts'ebetsong ea tlhahiso (haholo-holo likhase tse sa tloaelehang kapa tse sa sebetseng) e ka lebisa ho hloleheng ho hoholo ha lisebelisoa - kahoo bohloeki ba khase hona joale bo bohlokoa ho feta leha e le neng pele.

Bakeng sa fektheri e tloaelehileng ea tlhahiso ea li-semiconductor, khase e hloekileng haholo e se e ntse e le litšenyehelo tse kholo ka ho fetisisa tsa thepa kamora silicon ka boeona. Litšenyehelo tsena li lebelletsoe ho eketseha ha tlhoko ea li-semiconductor e ntse e eketseha ho ea holimo. Liketsahalo tsa Europe li bakile tšitiso e eketsehileng 'marakeng oa khase ea tlhaho o nang le khatello e phahameng haholo. Ukraine ke e 'ngoe ea barekisi ba kholo ka ho fetisisa lefatšeng ba nang le bohloeki bo phahameng.neonmatšoao; Tlhaselo ea Russia e bolela hore phepelo ea khase e sa tloaelehang ea fokotseha. Sena se ile sa lebisa khaellong le litheko tse phahameng tsa likhase tse ling tse ntle tse kangkryptonlexenon.