Mosebetsi oa Sulphur Hexafluoride in Silicon Nitride Etching

Sulfur hexafluoride is a gas with excellent insulating properties and is often used in high-voltage arc extinguishing and transformers, high-voltage transmission lines, transformers, etc. However, in addition to these functions, sulfur hexafluoride can also be used as an electronic etchant. Sehlopha se phahameng sa elektroniki se phahameng haholo SOLFURUORE HEXAFL Kajeno, NIU E SEBETSA YUAGY ea khase e tla hlahisa ts'ebeliso ea sebabole ea Silandfud le Sicon ea Siicon nitride e fapaneng.

Re tšohla seripa sa SF6 Plasma, ho kenyelletsa ho fetola matla a plasma, karohano ea khase ea SF6 / eena Rate, 'me u hlahlobe kamano pakeng tsa phetoho ea sekhahla sa tekolo sa text le mefuta ea liphoofolo tsa pente.

Boithuto bo fumane hore ha matla a plasma a eketseha, lebelo la etching lea eketseha; Haeba sekhahla sa ho phalla ha SF6 se ntse se eketseha, ho tsepamisoa mahlofatso ea F Atom. Ntle le moo, ka mor'a ho eketsa khase ea khase ea cation O2 ka tlasa palo ea phallo e fapaneng haholo, empa e tla thusa ka nako ena, 'me Tekano ea E2 . Empa ka nako e ts'oanang, liathomo tsa Plasma le tsona li ntse li eketseha 'me ho bonolo ho eketseha ka filimi ea motlakase, ho thata le liathomo tsa FOUTT e tla ba bakeng sa karabelo e kang ea ho batla. Ka hona, sekhahla sa ho itlotsa ho tsamaea butle ha karolelano ea O2 / SF6 e haufi le 1. (3) Ha tekanyo ea O2 / SF6 e kholo ho 1, sekhahla sa ho itšehla thajana. Ka lebaka la keketseho e kholo ea O2, e khelohileng thupeng ea O2 le mofuta, e fokotsang khatello ea lithomo, e fella ka sekhahla sa ho fokotseha ha sekhahla sa ho tima. E ka bonoa ho sena ha O2 E eketsoa, ​​karolelano ea phallo ea O2 / SF6 e pakeng tsa 0,2 le 0.8, sekhahla se setle ka ho fetisisa se ka fumanoa.