Hydrogen chlorideke kgase e senang mmala e monko o hlabang. Tharollo ea eona ea metsi e bitsoa hydrochloric acid, e tsejoang hape e le hydrochloric acid. Hydrogen chloride e qhibiliha haholo metsing. Ka 0°C, mothapo o le 1 oa metsi o ka qhala meqolo e ka bang 500 ea hydrogen chloride.

E na le litšobotsi le litšobotsi tse latelang:

1. Bohloeki bo phahameng

Bohloeki ba boemo ba elektronikehydrogen chloridee phahame haholo, hangata e le ppm kapa boemong bo tlase, ho netefatsa hore ha ho na litšila tse kenngoang tšebetsong ea tlhahiso ea semiconductor.

2. Ho hloka boikemelo

Ke khase e nang le lik'hemik'hale tse sa sebetseng le lintho tse ling tse ngata, tse bohlokoa haholo ho thibela tšilafalo ea lisebelisoa le lisebelisoa tsa semiconductor.

3. Botsitso bo phahameng

Kereiti ea elektronikehydrogen chlorideka kakaretso e na le k'hemistri e tsitsitseng ho netefatsa ts'ebetso e tšepahalang ea semiconductor.

Ts'ebetsong ea semiconductor, lits'ebetso tsa mantlha tsa elektroniki grade hydrogen chloride li kenyelletsa:

1. Ho hloekisa le ho lokisa holim'a metsi

Joalo ka sehloekisi se sebetsang hantle sa bokaholimo, boemo ba elektronikihydrogen chloridee sebelisetsoa ho tlosa li-oxide le litšila ho tloha ka holim'a substrate ho netefatsa boleng le bohloeki ba epitaxial layer kapa filimi.

2.Thuso ea kholo ea Epitaxial

E sebelisoa e le moemeli oa phekolo ea holim'a ts'ebetso ea epitaxial, e thusa ho ntlafatsa boleng ba lesela la epitaxial, ho ntlafatsa ho lumellana ha lattice, le ho fokotsa ho thehoa ha bokooa ba lattice.

3. Substrate pretreatment

Pele ho lokisoa lisebelisoa tsa semiconductor, sehlopha sa elektronikihydrogen chloridee ka sebelisoa ho tšoara sebaka sa substrate ho theha motheo o tsitsitseng ho ntlafatsa ho khomarela pakeng tsa epitaxial layer le substrate.

4. Moemeli ea thusang oa deposition

Ts'ebetsong ea tlhahiso ea mouoane oa lik'hemik'hale (CVD) kapa deposition ea 'mele ea mouoane (PVD), hydrogen chloride ea elektronike e ka sebelisoa e le sebaka sa phetisetso ea khase ho kenya letsoho karabelong ea thepa ea semiconductor.

5. Moemeli oa phetisetso ea khase ea khase

Joaloka moemeli oa phetisetso ea khase, li-precursors tse ling tsa gaseous li kenngoa ka kamoreng ea karabelo ho thusa ho lokisa sekhahla sa deposition le ho tšoana ha thepa.

Litšobotsi tsena li etsa mofuta oa elektronikehydrogen chloridesesebelisoa sa bohlokoa sa ts'ebetso ho thekenoloji ea semiconductor, e nang le tšusumetso e kholo mosebetsing le ho tšepahala ha sesebelisoa sa ho qetela.

Ntle le ts'ebeliso ea eona ts'ebetsong ea semiconductor, grade grade hydrogen chloride ea elektronike e ka fumana mefuta e sa tšoaneng ea tšebeliso libakeng tse ling, ho akarelletsa: Ho lokisetsa lisebelisoa tse phahameng tsa bohloeki, Lisele tsa Fuel, kholo ea thepa ea Semiconductor, Vapor Phase Lithography, Tlhahlobo ea Lintho, Lipatlisiso tsa Lik'hemik'hale.

Ka kakaretso, kereiti ea elektronikehydrogen chlorideke khase e nang le maemo a mangata, e hloekileng e nang le mefuta e mengata ea lisebelisoa ntle le tlhahiso ea semiconductor.