Khase ea laser e sebelisoa haholo indastering ea lisebelisoa tsa elektronike bakeng sa laser annealing le lithography gase. Ka ho rua molemo boqaping ba li-skrini tsa mehala ea thelefono le katoloso ea libaka tsa ts'ebeliso, sekala sa 'maraka oa mocheso o tlase oa polysilicon se tla atolosoa le ho feta,' me ts'ebetso ea laser annealing e ntlafalitse ts'ebetso ea TFTs haholo. Har'a likhase tsa neon, fluorine, le argon tse sebelisoang ho laser excimer laser bakeng sa ho etsa li-semiconductors, neon e nka karolo e fetang 96% ea motsoako oa khase ea laser. Ka ntlafatso ea mahlale a semiconductor, ts'ebeliso ea li-laser tsa excimer e eketsehile, mme ho hlahisoa ha theknoloji ea ponts'o habeli ho lebisitse keketsehong e matla ea tlhokahalo ea khase ea neon e sebelisoang ke lilase tsa ArF excimer. Ho rua molemo ho nts'etsopele ea sebaka sa libaka tsa likhase tse khethehileng tsa elektronike, bahlahisi ba malapeng ba tla ba le sebaka se setle sa kholo ea 'maraka nakong e tlang.
Mochini oa lithography ke sesebelisoa sa mantlha sa tlhahiso ea semiconductor. Lithography e hlalosa boholo ba transistors. Kholiso e hokahaneng ea ketane ea indasteri ea lithography ke senotlolo sa katleho ea mochini oa lithography. Lisebelisoa tse tsamaellanang tsa semiconductor joalo ka photoresist, khase ea photolithography, photomask, le lisebelisoa tsa ho roala le ho nts'etsapele li na le litaba tse phahameng tsa theknoloji. Khase ea lithography ke khase eo mochini oa lithography e hlahisang laser e tebileng ea ultraviolet. Likhase tse fapaneng tsa lithography li ka hlahisa mehloli e khanyang ea li-wavelengths tse fapaneng, 'me bolelele ba tsona bo ama ka ho toba tharollo ea mochine oa lithography, e leng e' ngoe ea li-cores tsa mochine oa lithography. Ka 2020, thekiso ea lefats'e ka bophara ea mechini ea lithography e tla ba li-unit tse 413, tseo ho tsona li-unit tse 258 tsa ASML li entseng karolo ea 62%, li-unit tsa Canon tsa thekiso ea 122 li nka karolo ea 30%, 'me thekiso ea Nikon ea 33 e nka karolo ea 8%.
Nako ea poso: Oct-15-2021
