Khase ea laser

Khase ea laser e sebelisoa haholo bakeng sa ho kenya le ho lahla mahlaseli a letsatsi le letsatsi le khase ea lithography indastering ea lisebelisoa tsa elektroniki. Ka ho rua molemo ho tsoa boqaping ba li-screen tsa mohala oa thekeng le katoloso ea libaka tsa ts'ebeliso, boholo ba 'maraka oa polysilicon oa mocheso o tlase bo tla atolosoa haholoanyane,' me ts'ebetso ea ho kenya le ho lahla mahlaseli a letsatsi e ntlafalitse haholo ts'ebetso ea li-TFT. Har'a likhase tsa neon, fluorine le argon tse sebelisoang ho ArF excimer laser bakeng sa ho etsa li-semiconductor, neon e ikarabella bakeng sa motsoako oa khase ea laser o fetang 96%. Ka ntlafatso ea theknoloji ea semiconductor, ts'ebeliso ea li-excimer lasers e eketsehile, 'me ho hlahisoa ha theknoloji ea ho pepesehela habeli ho lebisitse keketsehong e kholo ea tlhoko ea khase ea neon e sebelisoang ke li-excimer lasers tsa ArF. Ka ho rua molemo ho ntšetsong pele ea ho fumaneha ha likhase tse khethehileng tsa elektroniki, bahlahisi ba malapeng ba tla ba le sebaka se betere sa kholo ea 'maraka nakong e tlang.

Mochini oa Lithography ke sesebelisoa sa mantlha sa tlhahiso ea semiconductor. Lithography e hlalosa boholo ba li-transistors. Nts'etsopele e hokahaneng ea ketane ea indasteri ea lithography ke senotlolo sa katleho ea mochini oa lithography. Lisebelisoa tse tsamaellanang tsa semiconductor tse kang photoresist, khase ea photolithography, photomask, le lisebelisoa tse hohelang le tse ntlafatsang li na le litaba tse phahameng tsa theknoloji. Khase ea Lithography ke khase eo mochini oa lithography o e hlahisang laser e tebileng ea ultraviolet. Likhase tse fapaneng tsa lithography li ka hlahisa mehloli ea leseli ea maqhubu a fapaneng a maqhubu, 'me bolelele ba tsona ba maqhubu bo ama ka kotloloho qeto ea mochini oa lithography, e leng e 'ngoe ea li-core tsa mochini oa lithography. Ka 2020, thekiso eohle ea lefats'e ea mechini ea lithography e tla ba li-unit tse 413, tseo ho tsona thekiso ea ASML li-unit tse 258 li neng li etsa 62%, thekiso ea Canon li-unit tse 122 li neng li etsa 30%, 'me thekiso ea Nikon li-unit tse 33 li ne li etsa 8%.