Likhase tse khethehilenge fapane le kakaretsolikhase tsa indasterika hore di na le ditshebediso tse ikgethang mme di sebediswa mafapheng a itseng. Di na le ditlhoko tse ikgethang bakeng sa bohloeki, dikahare tsa ho se hlweke, sebopeho, le thepa ya mmele le ya dikhemikhale. Ha di bapiswa le dikgase tsa diindasteri, dikgase tse ikgethang di fapane haholo ka mefuta empa di na le tlhahiso e nyane le boholo ba thekiso.

Thelikhase tse tsoakiloenglelikhase tse tloaelehileng tsa ho lekanyaHangata re sebelisa likarolo tsa bohlokoa tsa likhase tse khethehileng. Likhase tse tsoakiloeng hangata li arotsoe ka likhase tse tsoakiloeng ka kakaretso le likhase tse tsoakiloeng tsa elektroniki.

Likhase tse tsoakiloeng ka kakaretso li kenyelletsa:khase e tsoakiloeng ka laser, ho lemoha disebediswa tsa kgase e tswakilweng, ho tjheseletsa kgase e tswakilweng, paballo ya kgase e tswakilweng, mohlodi wa lesedi la motlakase, dipatlisiso tsa bongaka le tsa baeloji, kgase e tswakilweng, ho bolawa ha dikokwana-hloko le ho bolawa ha dikokwana-hloko kgase e tswakilweng, alamo ya disebediswa tsa kgase e tswakilweng, kgase e tswakilweng ya kgatello e hodimo, le moya wa lefela.

Metswako ya khase ya elektroniki e kenyelletsa metswako ya khase ya epitaxial, metswako ya khase ya chemical vapor deposition, metswako ya khase ya doping, metswako ya khase ya ho tjhesa, le metswako e meng ya khase ya elektroniki. Metswako ena ya khase e bapala karolo ya bohlokwa diindastering tsa semiconductor le microelectronics mme e sebediswa haholo tlhahisong ya potoloho e kopaneng ya boholo bo boholo (LSI) le potoloho e kopaneng ya boholo bo boholo haholo (VLSI), hammoho le tlhahisong ya disebediswa tsa semiconductor.

Mefuta e 5 ea likhase tse tsoakiloeng tsa elektroniki ke tsona tse sebelisoang haholo

Ho sebelisa khase e tsoakiloeng ka doping

Ha ho etsoa disebediswa tsa semiconductor le dipotoloho tse kopaneng, ditshila tse itseng di kenngwa ka hara disebediswa tsa semiconductor ho fana ka conductivity le resistivity tse lakatsehang, e leng se nolofalletsang tlhahiso ya di-resistor, di-PN junctions, di-layer tse patilweng, le disebediswa tse ding. Dikhase tse sebediswang tshebetsong ya doping di bitswa dikhase tsa dopant. Dikhase tsena di kenyeletsa haholo-holo arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, le diborane. Mohlodi wa dopant hangata o kopanngwa le kgase e tsamaisang (jwalo ka argon le naetrojene) ka hara khabinete ya mohlodi. Kgase e tswakilweng e ntano kenngwa ka ho tswela pele ka seboping sa ho hasana mme e potoloha ho potoloha wafer, e behe dopant hodima bokahodimo ba wafer. Dopant ebe e arabela le silicon ho etsa tshepe ya dopant e fallelang ka silicon.

Motsoako oa khase ea kholo ea Epitaxial

Kgolo ya Epitaxial ke tshebetso ya ho kenya le ho hodisa thepa e le nngwe ya kristale hodima bokahodimo ba substrate. Indastering ya semiconductor, dikgase tse sebediswang ho hodisa lera le le leng kapa a mangata a thepa ka ho sebedisa chemical vapor deposition (CVD) hodima substrate e kgethilweng ka hloko di bitswa dikgase tsa epitaxial. Digase tse tlwaelehileng tsa silicon epitaxial di kenyeletsa dihydrogen dichlorosilane, silicon tetrachloride, le silane. Di sebediswa haholoholo bakeng sa epitaxial silicon deposition, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, le amorphous silicon film deposition bakeng sa disele tsa letsatsi le disebediswa tse ding tse utlwang lesedi.

Khase ea ho kenngoa ha li-ion

Tlhahisong ea lisebelisoa tsa semiconductor le potoloho e kopaneng, likhase tse sebelisoang ts'ebetsong ea ho kenya li-ion li bitsoa likhase tsa ho kenya li-ion. Litšila tse nang le ion (tse kang boron, phosphorus, le arsenic ions) li potlakisoa ho fihlela boemong bo phahameng ba matla pele li kenngoa ka har'a substrate. Theknoloji ea ho kenya li-ion e sebelisoa haholo ho laola motlakase oa moeli. Palo ea litšila tse kentsoeng e ka fumanoa ka ho lekanya motlakase oa mahlaseli a ion. Likhase tsa ho kenya li-ion hangata li kenyelletsa likhase tsa phosphorus, arsenic le boron.

Ho tjhesa khase e tsoakiloeng

Ho tjhesa ke mokhoa oa ho tjhesa bokaholimo bo sebetsitsoeng (joalo ka filimi ea tšepe, filimi ea silicon oxide, jj.) holim'a substrate e sa koaheloang ke photoresist, ha ka nako e ts'oanang e boloka sebaka se koahetsoeng ke photoresist, e le ho fumana mokhoa o hlokahalang oa ho nka litšoantšo holim'a bokaholimo ba substrate.

Motsoako oa Khase ea ho Tlosoa ha Mouoane oa Lik'hemik'hale

Ho beoa ha mouoane ka lik'hemik'hale (CVD) ho sebelisa metsoako e feto-fetohang ho beha ntho e le 'ngoe kapa motsoako ka karabelo ea lik'hemik'hale ea mouoane. Ena ke mokhoa oa ho etsa filimi o sebelisang liketso tsa lik'hemik'hale tsa mouoane. Likhase tsa CVD tse sebelisoang lia fapana ho latela mofuta oa filimi e etsoang.