Likhase tse khethehilengfapana le kakaretsolikhase tsa indasterika hore li na le ts'ebeliso e khethehileng 'me li sebelisoa mafapheng a ikhethileng. Ba na le litlhoko tse khethehileng tsa bohloeki, lintho tse sa hloekang, sebopeho, le thepa ea 'mele le ea lik'hemik'hale. Ha ho bapisoa le likhase tsa indasteri, likhase tse ikhethang li fapane haholo ka mefuta e fapaneng empa li na le lihlahisoa tse nyane le litheko tsa thekiso.

Thelikhase tse tsoakiloenglelikhase tse tloaelehileng tsa calibrationre atisa ho sebelisa ke likarolo tsa bohlokoa tsa likhase tse khethehileng. Hangata likhase tse tsoakiloeng li arotsoe ka likhase tse tsoakiloeng ka kakaretso le likhase tse tsoakiloeng tsa elektroniki.

Ligase tse tsoakiloeng ka kakaretso li kenyelletsa:laser e tsoakiloeng khase, ho lemoha ha sesebelisoa khase e tsoakiloeng, ho cheselletsa khase e tsoakiloeng, ho boloka khase e tsoakiloeng, mohloli oa leseli la motlakase oa khase e tsoakiloeng, lipatlisiso tsa bongaka le tsa likokoana-hloko khase e tsoakiloeng, ho bolaea likokoana-hloko le sterilization khase e tsoakiloeng, alamo ea lisebelisoa tsa khase e tsoakiloeng, khase e tsoakiloeng ka khatello e phahameng, le moea oa zero-grade.

Metsoako ea khase ea elektroniki e kenyelletsa metsoako ea khase ea epitaxial, motsoako oa khase ea mouoane oa lik'hemik'hale, motsoako oa khase ea doping, motsoako oa khase ea etching, le metsoako e meng ea khase ea elektroniki. Metsoako ena ea khase e bapala karolo ea bohlokoa indastering ea semiconductor le microelectronics 'me e sebelisoa haholo ho potoloho e kholo e kopaneng (LSI) le tlhahiso e kholo haholo ea potoloho e kopaneng (VLSI), hammoho le tlhahisong ea lisebelisoa tsa semiconductor.

5 Mefuta ea likhase tse tsoakiloeng tsa elektroniki ke tsona tse sebelisoang haholo

Doping khase e tsoakiloeng

Ha ho etsoa lisebelisoa tsa semiconductor le li-circuits tse kopantsoeng, litšila tse itseng li kenngoa ka har'a lisebelisoa tsa semiconductor ho fana ka conductivity e lakatsehang le resistivity, e leng ho nolofalletsang ho etsoa ha li-resistors, li-junctions tsa PN, likarolo tse patiloeng le lisebelisoa tse ling. Likhase tse sebelisoang ts'ebetsong ea doping li bitsoa likhase tsa dopant. Likhase tsena li kenyelletsa arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, le diborane. Mohloli oa dopant hangata o kopantsoe le khase e tsamaisang thepa (joalo ka argon le nitrogen) ka har'a khabinete ea mohloli. Khase e tsoakiloeng e tsoela pele ho kenngoa ka seboping sa sebopi ebe se potoloha sephaphatha, se beha dopant holim'a bokaholimo. Joale dopant e kopana le silicon ho etsa tšepe e kenang ka har'a silicon.

Motsoako oa khase ea kholo ea Epitaxial

Khōlo ea Epitaxial ke mokhoa oa ho kenya le ho hōlisa thepa e le 'ngoe ea kristale holim'a substrate. Indasteri ea semiconductor, likhase tse sebelisetsoang ho holisa karolo e le 'ngoe kapa ho feta tsa lisebelisoa ho sebelisa lik'hemik'hale tsa mouoane (CVD) holim'a substrate e khethiloeng ka hloko li bitsoa epitaxial gases. Likhase tse tloaelehileng tsa silicon epitaxial li kenyelletsa dihydrogen dichlorosilane, silicon tetrachloride, le silane. Li sebelisoa haholo-holo bakeng sa deposition ea epitaxial silicon, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, le amorphous silicon film deposition bakeng sa lisele tsa letsatsi le lisebelisoa tse ling tsa lifoto.

Khase ea ho kenya ion

Ka sesebelisoa sa semiconductor le tlhahiso e kopaneng ea potoloho, likhase tse sebelisoang ts'ebetsong ea ho kenngoa ha ion li bitsoa ka kopanelo e le likhase tse kenngoeng tsa ion. Litšila tse nang le ionized (tse kang boron, phosphorus, le arsenic ion) li potlakisetsoa ho ea boemong bo phahameng ba matla pele li kenngoa ka har'a substrate. Theknoloji ea ho kenya ion e sebelisoa haholo ho laola motlakase oa threshold. Palo ea litšila tse kentsoeng li ka khethoa ka ho lekanya lebelo la ion hona joale. Likhase tse kenngoeng ka ion hangata li kenyelletsa phosphorus, arsenic le likhase tsa boron.

Ho kenya khase e tsoakiloeng

Etching ke mokhoa oa ho tlosa sebaka se sebetsitsoeng (joalo ka filimi ea tšepe, filimi ea silicon oxide, joalo-joalo) holim'a substrate e sa patoang ke photoresist, ha ho ntse ho bolokoa sebaka se koahetsoeng ke photoresist, e le ho fumana mokhoa o hlokahalang oa ho nka litšoantšo holim'a substrate.

Motsoako oa Khase ea Mouoane oa Lik'hemik'hale

Chemical vapor deposition (CVD) e sebelisa metsoako e feto-fetohang ho kenya ntho e le 'ngoe kapa motsoako ka tsela ea lik'hemik'hale tsa mouoane. Ena ke mokhoa oa ho etsa lifilimi o sebelisang liphetoho tsa lik'hemik'hale tsa mouoane. Likhase tsa CVD tse sebelisoang lia fapana ho latela mofuta oa filimi e etsoang.