Nts'etsopele ea rona e itšetlehile ka lisebelisoa tse tsoetseng pele, li le matla a maphathaphathe le boima ba theknoloji e potlakileng bakeng sa kakaretso ea selemo sa 2019 ClatrafluorideCF4, Re tsepamisa maikutlo ho ho fana ka lihlahisoa le tharollo ho fana ka thuso bakeng sa barekisi ba rona ho hlokomela ts'ebelisano ea nako e telele ea win-fihla tšebelisano le nako e telele.
Tsoelo-pele ea rona e itšetlehile ka lisebelisoa tse tsoetseng pele, li tabonte tse ntle le tse tsoelang pele tse matlafalitsoeng tsa mahlaleCF4, China Carbon Tetrafluoride, E tataisoa ke litšitiso tsa bareki, e shebileng ho ntlafatsa ts'ebetso le boleng ba tšebeletso ea bareki, re lula re ntlafatsa thepa le ho fana ka lits'ebeletso tse batsi. Re amohela metsoalle ea ho buisana le khoebo ebe re sebelisa tšebelisano le rona. Re tšepa hore re tla ikopanya le matsoho indastering ea maemo a fapaneng ho theha bokamoso bo khanyang.
TLHOKOMELISO | 99.999% |
Oksijene + ea oksijene + | ≤1ppm |
Nitrogen | ≤4 PPM |
Mongobo (H2O) | ≤3 PPM |
HF | ≤0.1 PPM |
CO | ≤0.1 PPM |
Co2 | ≤1 PPM |
SF6 | ≤1 PPM |
Halocarbynes | ≤1 PPM |
LITLHAKISO TSA BOPHELO | ≤10 PPM |
Khabone tetrafluoride ke hydrocarborbon e hapugrocan e nang le foromo ea lik'hemik'haleCF4. E ka nkuoa e le hydrocarbon e hapugrocan, methanete methane, Perfbuorocarbornon, kapa joalo ka motsoako o ka hare. Carbon Tetrafluoor ke khase e se nang 'mala le e nang le monko o motle, e sa phekoloang ka metsing, e qhibilihe ka metsing, e qhibilihang Benzene le chloroform. E tsitsitseng tlasa mocheso o tloaelehileng le khatellong e matla, qoba li-oxidants tse matla, lisebelisoa tse ntle kapa tse nang le matla. Khase e sa lefelloeng, khatello ea kahare ea setshelo e tla eketseha ha e pepesoa mocheso o phahameng, mme ho na le kotsi ea ho tšela le ho phatloha. E tsitsitse e tsitsitseng ebile e se na khanya. Ho beoa feela a ammonia-sodium ea tšepe e ka sebetsa mochesong oa kamore. Carbon Tetrafluoride ke khase e bakang phello ea sethopo. E tsitsitse haholo, e ka lula sepakapakeng nako e telele, 'me ke mafura a matla a futhumatsang a futhumatsang. Carbon Tetraflu ea Carbon Tetrafluoride e sebelisoa ts'ebetsong ea liqhomane tse fapaneng tse kopaneng tsa lipotoloho. E boetse e sebelisoa e le khase ea laser, 'me e sebelisoa ka li-ralglirate tsa mocheso, li-solvent, li-lubrictricts, li lekola thepa le liphula tsa liphula. Ke li-plasma tse sebelisoang ka ho fetisisa tsa plasma e sa sebetseng ka ho fetisisa indastering ea likonyana tsa likoetsi tsa likokoana-hloko. Ke motsoako oa Tetrafluromethanetsanathane phahameng ka ho hlaka ha khase e phahameng ea khase le oksijene ea bohloeki e phahameng. E ka sebelisoa haholo silile ea silicon, silion dioxide, silicon nitride, le phosphosisate e ngata. Ho itšehla thajana tse tšesali tse kang tungsten le tungsten le tsona li sebelisoa hohle ho hloekisa lisebelisoa tsa elektroniki, tlhaiso-leseling e tlase ea mocheso. E sebelisoang e le sehlahisoa sa mocheso o tlase le plasma o omileng bakeng sa lipotoloho tse kopaneng. Litemoso tsa polokelo ea polokelo: Boloka ka ntlong e pholileng, e nang le moea o monyane eseng ea ntlo ea khase ea khase. Tlohela hole le mollo le mehloli ea mocheso. Mocheso oa polokelo ha oa lokela ho feta 30 ° C. E lokela ho bolokoa ka thoko ho (e potlakileng) le li-oxidants, mme e qobe polokelo e tsoakiloeng. Sebaka sa polokelo se lokela ho ba le lisebelisoa tsa ho li qoba.
① sehatsetsi:
Tetrafluromethane ka linako tse ling e sebelisoa e le sehatsetsi la mocheso o tlase.
② Etching:
E sebelisoa ho li-microfabebrics feela kapa li kopantsoe le oksijene joalo ka ha ho na le oksijene joalo ka ha ho na le oksijene
Sehlahisoa | Carbon Tetrafluoride Cf4 | ||
Boholo ba sephutheloana | 40lr silindar | 50ltr silindar | |
Ho tlatsa boima ba 'mele / cyl | 30Kgs | 38Kgs | |
Qty e imetsoe ka 20'container | Li-cons tse 250 | Li-cons tse 250 | |
Boima bo felletseng ba matlo | Lithane tse 7.5 | Lithane tsa 9.5 | |
Cylindar Tare Boima | 50KGs | 55kgs | |
Valve | CGA 580 |
Ho hloeka hoa bohloeki, setsi sa morao-rao;
Moetsi oa setifikeiti sa ②iso;
PUSELETSO;
Sistimi ea tlhahlobo ea likolobe ea taolo ea boleng bo maemong a mang le e 'ngoe;
Boikemisetso le ts'ebetso e matlafatsang ea ho sebetsana le silinda pele u ntse u tlatsa;Tsoelo-pele ea rona e itšetlehile ka lisebelisoa tse tsoetseng pele, tse ntlafatsang tse matlafatsang ho fana ka lithuso tse ntle tsa leoatle ho hlokomela barekisi ba nako e telele.
Kakaretso ea 2019 WholesaleChina Carbon Tetrafluoride, Cf4, e tataisoa ke litšitiso tsa bareki, e shebileng ho ntlafatsa ts'ebetso le boleng ba tšebeletso ea bareki, re lula re ntlafatsa thepa le ho fana ka lits'ebeletso tse batsi. Re amohela metsoalle ea ho buisana le khoebo ebe re sebelisa tšebelisano le rona. Re tšepa hore re tla ikopanya le matsoho indastering ea maemo a fapaneng ho theha bokamoso bo khanyang.